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OXFORD PLASMA PRO 100

Key dates

Posted
Jun 16, 2026
Response deadline
Jul 2, 2026, 3:00 PM UTC
Archive date
Archive type
auto15

Classification

Notice type
Sources Sought
Base type
Sources Sought
Set-aside
No Set aside used
Set-aside code
NONE
PSC
J066

NAICS

Issuing office

Department
DEPT OF DEFENSE
Sub-tier
DEPT OF THE AIR FORCE
Office
FA8601 AFLCMC PZIO
Office code
Organization type
OFFICE
Office address
WRIGHT PATTERSON AFB, OH, 45433-5344, USA

Place of performance

Street
Street 2
City
Wright Patterson AFB
State
OH
Zip
45433
Country
USA

Contacts

Description

SOURCES SOUGHT SYNOPSIS Title: Purchase, Installation, and Training for a PlasmaPro 100 Reactive Ion Etch (RIE) System Agency: Department of the Air Force, Air Force Materiel Command, Air Force Life Cycle Management Center (AFLCMC) Location: Wright-Patterson AFB, OH Classification Code: J066 - Maintenance, Repair and Rebuilding of Equipment-Instruments and Laboratory Equipment NAICS Code: 811310 - Commercial and Industrial and Machinery and Equipment This is a Sources Sought Synopsis announcement only. This is not a solicitation for proposals, proposal abstracts, or quotations. The purpose of this synopsis is to gain knowledge of potential qualified sources and their size classification (Small Business, HUBZone, 8(a), Service-Disabled Veteran-Owned Small Business, Women-Owned Small Business, etc.) relative to NAICS code 334516. The Government is seeking to identify responsible and eligible vendors who can provide all personnel, equipment, tools, parts, and supervision necessary to perform installation, setup, testing, and training for one Oxford Plasma Pro 100 RIE system, along with all required support equipment (chillers, vacuum systems, etc.). The equipment will be located in the Engineering Laboratory at the Air Force Institute of Technology (AFIT), Wright-Patterson AFB, OH. The period of performance is 120 days after contract award. This requirement is anticipated to be above the Simplified Acquisition Threshold (SAT). The full list of required components is detailed in the attached Statement of Work. Key components include, but are not limited to: PlasmaPro 100 ICP Etch system with a 208V 60Hz 3-phase supply. Cobra300 3kW ICP plasma etch source. Cryo-cooled/electrically-heated etch lower electrode kit. Complete gas delivery system including standard and by-passed gaslines, MFCs, and a split gas manifold. Associated vacuum pumps, chillers, and control hardware (PC, monitor, etc.). INSTRUCTIONS FOR RESPONSE: Interested parties are requested to submit a capabilities statement that shall include the following information: Company Information: Company name, physical mailing address, and CAGE/DUNS Code. Point of Contact: Name, phone number, and email address of a designated point of contact. Ownership: A statement as to whether your company is domestically or foreign-owned or controlled (if foreign, please indicate the country), and whether use of any foreign national employees is contemplated on this effort. Socio-Economic Status: Statement of socio-economic status (e.g., Large Business, Small Business, 8(a), HUBZone, Service-Disabled Veteran-Owned Small Business, etc.). Manufacturer/Distributor Status: Indicate if you are the manufacturer of the system or a distributor. If a distributor, provide the name of the manufacturer. Proprietary Data: A statement confirming whether the respondent will allow the Government to release any proprietary data submitted. The Air Force will handle proprietary items in accordance with RFO 2.101 and 3.104. Past Performance: Describe your company's past experience on previous projects of similar complexity to this requirement. Include contract numbers, project descriptions, agency/organization supported, and a point of contact for each reference. Capabilities: Briefly describe the capabilities of your facility and the nature of the services/supplies you provide. System Viability: Identify any specific requirements in the provided documentation that would currently preclude your product/service from being a viable solution. Commerciality: Provide recent sales history to commercial companies to help determine commerciality. State if the product/service is offered to both U.S. Government and commercial sources under similar terms and conditions, and briefly describe any differences. Attention Small Business Respondents: The acquisition strategy for this requirement has not been decided. The Air Force is contemplating a small business set-aside if there is sufficient demonstrated interest and capability. Note that a key factor is that two or more small business prime contractors must be capable of performing at least 50% of the cost of the contract for personnel with their own employees, as defined in RFO clause 52.219-14, Limitations on Subcontracting. If you are a small business, please provide specific details and rationale as to how you would comply with this clause. Attention All Potential Respondents: If this acquisition is not set aside for small business, it may include a small business utilization requirement. Please provide feedback on what areas of this requirement are likely candidates for small business subcontracting. Please submit your responses via email to the contracting office points of contact: Ms. Candice L. Snow (candice.snow@us.af.mil) and Mr. Brian Algeo (brian.algeo.1@us.af.mil)

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Metadata

Notice ID
c521d63d8e604943b379e9ee6c305ac2
Full path
DEPT OF DEFENSE.DEPT OF THE AIR FORCE.FA8601 AFLCMC PZIO
Office code
Ingested
Jun 17, 2026
Updated
Jul 11, 2026