← All federal awardeesSPINNER ICT INCUEI SMFHE5KKART8 · 1 award · $98,000 totalAwards?Sort:Date▼AmountPrimary S-Parameter Standards for Plasma Etching RecordCOMMERCE, DEPARTMENT OF / NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY1333ND26PNB030117Analytical Laboratory Instrument Manufacturing$98,000May 5, 2026